ARTICLES MADE OF HIGH - PURITY PYROLYTIC BORON NITRIDE (PyBN)

 

New high-purity materials based on pyrolytic boron nitride are created. It is possible both to manufacture boron nitride articles and to deposit pyrolytic boron nitride as a coating onto shaped workpieces made of Mo, W, SiO2, graphite and other materials.

 

High purity (impurity content of <10-3...10-4 wt.% being at a level of best engineering grades), the density close to the theoretical value, possible variants of isotropic and anisotropic structures, homogeneity, high electrical insulation properties, no wettability with liquid melts of gallium arsenide and silicon, ease of manufacture are the distinguishing features of our materials.

 

Applications include:

 

 

        crucibles of different designs and other elements of the industrial equipment for growing special-purity semiconductor single crystals with a low level of structure defects;

        elements of heating units in furnaces for high-temperature chemical procedures and techniques;

        super-fine vacuum-tight films of synchrotron, SHF, X-ray radiation exit windows;

   thin-film substrates, transistor holders, resistor bases, heat conducting elements in microelectronics.

BASIC PERFORMANCE CHARACTERISTICS

 

OF CRUCIBLES MADE OF HIGH - PURITY PYROLYTIC BORON NITRIDE

 

1. The crucible dimensions:

 

diameter up to 150 mm

height up to 200 mm

wall thickness up to 2 mm

 

2. The density PyBN. 2.26 g/3

 

3. The impurities contents (total) < 10-3 - 10-4 % wt

 

 

4. The basic impurities contents in PyBN (% wt)

 

Mg

Al

Si

S

K

1×10-4

2×10-4

< 3×10-3

4×10- 4

< 2×10-3

Ca

Ti

Cr

Mn

Fe

6×10-4

< 5×10-4

< 5×10-5

< 3×10-5

6×10-4

Co

Ni

Cu

Zn

Ge

< 3×10-5

< 2×10-5

2×10-4

< 7×10-5

< 5×10-5

 

5. Specific resistance 1019 Ohm×

 

6. No wettability with liquid melts of GaAs, Si, Au, Ag.

 

7. It is possible to deposit pyrolytic boron nitride as a coatings by thickness 0,1-1 mm onto (into) shaped workpieces, including crucibles, components of process equipment from carbon, quartz, refractory metals.

Basic performance characteristics are the same as above.

Rambler's Top100