Methods CVD and PECVD coatings Deposition

 

Basis of methods processes (CVD, PECVD) make formations of coatings at pyrolysis (hydrogen restoration) gaseous chemical compounds from steam phase of various elements in conditions of atom-ionic modifying a surface and excitation nonequilibrium low temperature plasma with the temperature of active particles reaching millions of degrees.

Formation of coatings by a CVD method occurs due processes on the heated up surface of products of heterogeneous processes of decomposition (hydrogen restoration) металлсодержащих the chemical compounds which are taking place in reactionary volume in a gaseous condition.

Due to high mobility and intensity of mass transfering process inherent to gaseous medias CVD methods of coating deposition have exclusive "covering" ability. An opportunity to produce high mass flows of metall containing compound in gaseous form to coated surface gives an opportunity achieve high speed and efficiency of coating grows processes. Growth speed in CVD processes can be from hundreds of mkm up mm per hour

High superficial mobility of the adsorbed metallorganic compound allows in CVD processes to get coverages with a closeness, near to theoretical, at temperatures ~ 0,15-0,3 from the temperature of melting of material, that off-line for other methods of coating deposition, and also to form perfect all-epitaxial coverages.

Relative simplicity of cleaning from most admixture elements on the stage of receipt of metallorganic compounds due to electoralness of processes of chemical interaction of components on the heated surface, additional distillation in the process of his translation in a gaseity from the hard or liquid state, in which these connections usually are at normal terms, stipulate the high degree of cleanness of CVD depositid coatings.


By the powerful instrument of influence both on kinetics of CVD of processes of coating and properties of coatings there is plasma support (PECVD). Application of different receptions of excitation of plasma in a reactionary volume and management it parameters allows to intensify the processes of coatings deposition, move them in the area of more low temperatures, does more guided the processes of forming of microrouhgness and structure of coating, admixture composition and other coating properties.


Thus among known high quality coating methods CVD and PECVD methods are beyond comparison in most of cases when we have to:

 

Use of gase phase and plasmachemistry methods in a complex with other methods of coating and surface engeneering (methods of the ionic alloying, implantation, vacuum-plasma, diffusive, vacuum thermal and other) in a yet greater measure extends possibilities of creation of fundamentally new materials and coverages.

Most effective application of PEPVD and PECVD methods for:

Methods advantages:

Use of gase phase and plasmachemistry methods in a complex with other methods of coating and surface engeneering (methods of the ionic alloying, implantation, vacuum-plasma, diffusive, vacuum thermal and other) in a yet greater measure extends possibilities of creation of fundamentally new materials and coverages.

Possible application:

 

Разработка базовых технологических процессов и конкретных технологий, основанных на модифицировании поверхности при имплантации ионов, нанесении покрытий при осаждении из газовой фазы (CVD-процессы), ионно-плазменных и плазмохимических процессах (PECVD-процессы) для применения в:

 

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