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, 61108, , / 9410

: +38 057 755 0607,

 

: +38 050 302 7955

e-mail: iht@kharkov.ua, www.nano.org.ua

 

..., ,

Available deposition Methods

 

* combination deposition methods "Hi-Tech"

* Chemical vapour deposition methods (CVD and PECVD)

* Vacuum arc coatings deposition

* Filtered vacuum arc coatings deposition (FAD)

* Magnetron sputtering

 

 

 

Deposition methods

Technological abilities

Equipment

 

 

 

CVD, PECVD

Vacuum arc including FAD (filtered arc deposition)

Magnetron sputtering (RF &DC)

Ion beam and Plasma assisted

 

 

 

(siliconizing, boronizing and etc .)

 

 

Ionic saturation (ionic nitrcding, carburazing, oxidazing)

 

 

 

 

 

Implantation

 

 

 

Ion etching

Ion cleaning

Ion polishing

 

 

 

Rambler's Top100