CVD&PECVD (Chemical Vapour Deposition & Plasma Enchanced CVD)
ALD (Atomic Layer Deposition)
Electron Beam
Sputtering Method
Vacuum diffusive saturation (siliconizing, aluminizing, boronizing)
Ion saturation (nitration, case-hardening, oxidazing)
Implantation
Ion etching
Ion cleaning
Ion polishing